1. Laboratory of Integrated Micro- and Nanosystems, Belarusian State University of Informatics and Radioelectronics, P. Brovki Str. 6, 220013 Minsk, Republic of Belarus
2. B.I. Stepanov Institute of Physics, National Academy of Sciences, Nezavisimosti Ave. 68, 220072 Minsk, Republic of Belarus
3. Scientific-Technical Center “Belmicrosystems”, Kazintsa Str. 121 A, 220108 Minsk, Republic of Belarus