Dynamic Liquid Membrane Electrochemical Modification of Carbon Nanotube Fiber for Electrochemical Microfabrication
Author:
Affiliation:
1. College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
2. Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing 210016, China
Funder
Natural Science Foundation of Jiangsu Province
National Natural Science Foundation of China
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.9b17797
Reference52 articles.
1. Microelectromechanical systems (MEMS): fabrication, design and applications
2. Materials issues in microelectromechanical systems (MEMS)
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4. A review on process capabilities of electrochemical micromachining and its hybrid variants
5. Wire electrochemical micromachining of Ni-based metallic glass using bipolar nanosecond pulses
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