Thermal and Plasma-Enhanced Atomic Layer Deposition of Yttrium Oxide Films and the Properties of Water Wettability
Author:
Affiliation:
1. Department of Solid State Sciences, Ghent University, Krijgslaan 281 S12, 9000 Ghent, Belgium
Funder
Universiteit Gent
Fonds Wetenschappelijk Onderzoek
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.9b18412
Reference63 articles.
1. Structure, morphology and optical properties of nanocrystalline yttrium oxide (Y2O3) thin films
2. Thermal Conductivity, Diffusivity, and Expansion of Y2O3, Y3 Al5O12, and LaF3 in the Range 77°–300°K
3. Phase diagram of the ZrO2-Y2O3-Sm2O3 system in the melting-point region
4. Effects of Y2O3 and yttrium aluminates as sintering additives on the thermal conductivity of AlN ceramic substrates
5. Effect of point defects on the thermal conductivity of Sc2O3-Y2O3 co-stabilized tetragonal ZrO2 ceramic materials
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