Micro/Nanostructure Engineering of Epitaxial Piezoelectric α-Quartz Thin Films on Silicon-Reference-Cited by-同舟云学术

Micro/Nanostructure Engineering of Epitaxial Piezoelectric α-Quartz Thin Films on Silicon

Published:2019-12-27 Issue:4 Volume:12 Page:4732-4740
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Zhang Qianzhe¹²,Sánchez-Fuentes David¹,Desgarceaux Rudy¹,Escofet-Majoral Pau¹,Oró-soler Judith²,Gázquez Jaume²,Larrieu Guilhem³,Charlot Benoit¹^ORCID,Gómez Andrés²^ORCID,Gich Martí²^ORCID,Carretero-Genevrier Adrián¹^ORCID

Affiliation:

1. Institut d’Electronique et des Systemes (IES), CNRS, Université de Montpellier, 860 Rue de Saint Priest 34095 Montpellier, France

2. Institut de Ciència de Materials de Barcelona ICMAB, Consejo Superior de Investigaciones Científicas CSIC, Campus UAB, 08193 Bellaterra, Catalonia, Spain

3. LAAS-CNRS, Université de Toulouse, CNRS, INP, 7 av. Colonel Roche, 31031 Toulouse, France

Funder

Agence Nationale de la Recherche

Ministerio de Ciencia, Innovaci?n y Universidades

Generalitat de Catalunya

China Scholarship Council

European Social Fund

Universitat Aut?noma de Barcelona

H2020 European Research Council

Publisher

American Chemical Society (ACS)

Subject