Hierarchically Ordered Silicon Metastructures from Improved Self-Assembly-Based Nanosphere Lithography
Author:
Affiliation:
1. Department of Electrical and Electronic Engineering, Southern University of Science and Technology, Shenzhen 518055, China
2. Harbin Institute of Technology, Harbin 150001, China
Funder
Government of Guangdong Province
Shenzhen Science and Technology Innovation Commission
National Natural Science Foundation of China
Natural Science Foundation of Guangdong Province
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.9b22932
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