Reuse of Semiconductor Wastewater Using Reverse Osmosis and Metal-Immobilized Catalyst-Based Advanced Oxidation Process

Author:

Choi Jeongyun1,Chung Jinwook1

Affiliation:

1. R&D Center, Samsung Engineering Co. Ltd., Woncheon-Dong, Youngtong-Gu, Suwon, Gyeonggi-Do 443-823, Korea

Publisher

American Chemical Society (ACS)

Subject

Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry

Reference28 articles.

1. Yao, M. A.; Wilson, A. R.; McManus, T. J.; Shadman, F.Comparative analysis of the manufacturing and consumer use phases of two generations of semiconductor microprocessors.Proc. IEEE Int. Symp. Electron. Environ., Conf. Rec.May 10–13, 2004; pp97–103.

2. Combined membrane bioreactor (MBR) and reverse osmosis (RO) system for thin-Þlm transistor - liquid crystal display TFT-LCD, industrial wastewater recycling

3. Nitrification–Denitrification of Opto-electronic Industrial Wastewater by Anoxic/Aerobic Process

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