Reuse of Semiconductor Wastewater Using Reverse Osmosis and Metal-Immobilized Catalyst-Based Advanced Oxidation Process
Author:
Affiliation:
1. R&D Center, Samsung Engineering Co. Ltd., Woncheon-Dong, Youngtong-Gu, Suwon, Gyeonggi-Do 443-823, Korea
Publisher
American Chemical Society (ACS)
Subject
Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ie500805x
Reference28 articles.
1. Yao, M. A.; Wilson, A. R.; McManus, T. J.; Shadman, F.Comparative analysis of the manufacturing and consumer use phases of two generations of semiconductor microprocessors.Proc. IEEE Int. Symp. Electron. Environ., Conf. Rec.May 10–13, 2004; pp97–103.
2. Combined membrane bioreactor (MBR) and reverse osmosis (RO) system for thin-Þlm transistor - liquid crystal display TFT-LCD, industrial wastewater recycling
3. Nitrification–Denitrification of Opto-electronic Industrial Wastewater by Anoxic/Aerobic Process
Cited by 18 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Application of an ozone-activated peroxymonosulfate process to effectively degrade tetramethylammonium hydroxide (TMAH) in semiconductor wastewater;Journal of Water Process Engineering;2024-11
2. Anaerobic biodegradation enables zero liquid discharge of two-stage nanofiltration system for microelectronic wastewater treatment;Journal of Hazardous Materials;2024-08
3. Performance and fouling characteristics in a pilot-scale reverse osmosis membrane system for microelectronic wastewater treatment;Separation and Purification Technology;2024-06
4. Application of an Ozone-Activated Peroxymonosulfate Process to Effective Degradation of Tetramethylammonium Hydroxide (Tmah) in Semiconductor Wastewater;2024
5. Environmental aspects of planarization processes;Advances in Chemical Mechanical Planarization (CMP);2022
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3