Molecular Dynamics Simulation of Interaction between Supercritical CO2 Fluid and Modified Silica Surfaces-Reference-Cited by-同舟云学术

Molecular Dynamics Simulation of Interaction between Supercritical CO2 Fluid and Modified Silica Surfaces

Published:2008-07-29 Issue:33 Volume:112 Page:12815-12824
ISSN:1932-7447
Container-title:The Journal of Physical Chemistry C
language:en
Short-container-title:J. Phys. Chem. C

Author:

Qin Yan¹,Yang Xiaoning¹,Zhu Yongfang¹,Ping Jialun¹

Affiliation:

1. State Key Laboratory of Material-Orientated Chemical Engineering, College of Chemistry and Chemical Engineering, Nanjing University of Technology, Nanjing 210009, China, and Department of Physics, Nanjing Normal University, Nanjing 210097, China

Publisher

American Chemical Society (ACS)

Subject

Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials

Link

https://pubs.acs.org/doi/pdf/10.1021/jp711964e

Reference79 articles.

1. An overview of supercritical CO2 applications in microelectronics processing

2. Carbon Dioxide Snow Cleaning

3. Supercritical carbon dioxide-assisted oxidative degradation and removal of polymer residue after reactive ion etching of photoresist

4. Green chemistry in the microelectronics industry

5. Utilization of critical fluids in processing semiconductors and their related materials

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