Enhanced Performance of ZnO/SiO2/Al2O3 Surface Acoustic Wave Devices with Embedded Electrodes-Reference-Cited by-同舟云学术

Enhanced Performance of ZnO/SiO2/Al2O3 Surface Acoustic Wave Devices with Embedded Electrodes

Published:2020-08-24 Issue:37 Volume:12 Page:42378-42385
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Su Rongxuan¹,Fu Sulei¹^ORCID,Shen Junyao¹,Chen Zhenglin²,Lu Zengtian³,Yang Mingliang⁴,Wang Rui¹,Zeng Fei¹^ORCID,Wang Weibiao⁴,Song Cheng¹^ORCID,Pan Feng¹

Affiliation:

1. Key Laboratory of Advanced Materials (MOE), School of Materials Science and Engineering, Tsinghua University, Beijing 100084, China

2. School of Electronic Science and Engineering, Nanjing University, Nanjing 210093, China

3. School of Mechanical Engineering, Southeast University, Nanjing 211189, China

4. SHOULDER Electronics Limited, Wuxi 214124, Jiangsu, China

Funder

Ministry of Science and Technology of the People's Republic of China

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.0c12055

Reference43 articles.

1. Improved resistance to electromigration and acoustomigration of Al interdigital transducers by Ni underlayer

2. A Snapshot in Time: The Future in Filters for Cell Phones

3. Palladium Nanoparticle-Based Surface Acoustic Wave Hydrogen Sensor

4. High-Performance SAW Resonator on New Multilayered Substrate Using LiTaO3Crystal

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