Deformation Behavior of Glass Nanostructures in Hot Embossing
Author:
Affiliation:
1. Guangdong Provincial Key Laboratory of Micro/Nano Optomechatronics Engineering, College of Mechatronics and Control Engineering, Shenzhen University, Shenzhen 518060, China
Funder
Natural Science Foundation of Guangdong Province
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.0c08435
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