1. Center for Microtechnologies, Chemnitz University of Technology, Chemnitz, Sachsen 09126, Germany
2. Center for Advancing Electronics Dresden CFAED, Dresden, Saxony 01062, Germany
3. Department Back-End of Line, Fraunhofer Institute for Electronic Nano Systems, Chemnitz, Sachsen 09126, Germany
4. Chair for Electron Devices and Integrated Circuits, Dresden University of Technology, Dresden, Sachsen 01062, Germany