1. Key Laboratory for Advanced Materials Processing Technology, Ministry of Education of China, State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, P. R. China
2. Tianjin Navigation Instruments Research Institute, Tianjin 300131, P. R. China
3. Han’s Laser Technology Industry Group Co., Ltd., Shenzhen, Guangdong Province 518126, P. R. China
4. Department of Mechanical Engineering, University of Minnesota, Minneapolis, Minnesota 55455, United States
5. Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, P. R. China