High-Resolution Lithographic Patterning with Organotin Films: Role of CO2 in Differential Dissolution Rates
Author:
Affiliation:
1. Department of Chemistry, Oregon State University, Corvallis, Oregon 97331, United States
Funder
Division of Chemistry
Oregon State University
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.0c21942
Reference69 articles.
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