1. Precision Mechanical Process and Control R&D Group, Korea Institute of Industrial Technology, Sasang-gu, Busan 46938, Republic of Korea
2. Surface Treatment Group, Korea Institute of Industrial Technology, Yeonsu-gu, Incheon 21999, Republic of Korea
3. Micro/Nano Scale Manufacturing R&D Group, Korea Institute of Industrial Technology, Ansan-si 15588, Gyeonggi-do, Republic of Korea