Sacrificial Water-Soluble BaO Layer for Fabricating Free-Standing Piezoelectric Membranes
Author:
Affiliation:
1. College of Engineering, Department of Electrical and Electronic Engineering, Nihon University, Koriyama 963-8642, Japan
2. JST PRESTO, Saitama 332-0012, Japan
3. Institute for Solid State Physics, University of Tokyo, Kashiwa 277-8581, Japan
Funder
Precursory Research for Embryonic Science and Technology
Japan Society for the Promotion of Science
Japan Science and Technology Agency
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/acsami.0c05830
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