1. Institute
of Applied Micro-Nano Science and Technology, Chongqing Engineering
Laboratory for Detection, Control and Integrated System, Chongqing Technology and Business University, Nan’an District, Chongqing 400067, China
2. Department
of Micro and Nano Systems Technology (IMST), Faculty of Technology
and Maritime Sciences (TekMar), Buskerud and Vestfold University College (HBV), Borre N3184, Norway