1. Institute for Mechanical Systems Engineering (IMSE), National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan, Technology Platform Research Center (TPRC), SEIKO-EPSON Corporation, Fujimi Plant 281, Fujimi-machi, Suwa-gun, Nagano 392-8502, Japan