1. Department
of Pharmaceutics and Biopharmaceutics, Johannes Gutenberg University Mainz, 55099 Mainz, Germany
2. BioNTech RNA Pharmaceuticals, 55131 Mainz, Germany
3. HASYLAB, DESY, 22607 Hamburg, Germany
4. Max Planck Institute of Colloids and Interfaces, 14476 Potsdam, Germany
5. Institute
for Molecular Biophysics, Johannes Gutenberg University Mainz, 55099 Mainz, Germany