Double-Side-Coated Nanomechanical Membrane-Type Surface Stress Sensor (MSS) for One-Chip–One-Channel Setup-Reference-Cited by-同舟云学术

Double-Side-Coated Nanomechanical Membrane-Type Surface Stress Sensor (MSS) for One-Chip–One-Channel Setup

Published:2013-06-06 Issue:24 Volume:29 Page:7551-7556
ISSN:0743-7463
Container-title:Langmuir
language:en
Short-container-title:Langmuir

Author:

Yoshikawa Genki¹,Loizeau Frederic²,Lee Cory J. Y.¹³,Akiyama Terunobu²,Shiba Kota¹,Gautsch Sebastian²,Nakayama Tomonobu¹,Vettiger Peter²,de Rooij Nico F.²,Aono Masakazu¹

Affiliation:

1. World Premier International (WPI) Research Center, International Center for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), 1-1 Namiki, Tsukuba, Ibaraki 305-0044, Japan

2. Institute of Microengineering (IMT), Ecole Polytechnique Fédérale de Lausanne (EPFL), Jaquet-Droz 1, Neuchâtel CH-2002, Switzerland

3. University of Waterloo, 200 University Avenue West, Waterloo, Ontario N2L 3G1, Canada

Publisher

American Chemical Society (ACS)

Subject

Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/la3046719

Reference29 articles.

1. Photothermal spectroscopy with femtojoule sensitivity using a micromechanical device

2. Observation of a chemical reaction using a micromechanical sensor

3. Thermal and ambient‐induced deflections of scanning force microscope cantilevers