Extreme Bottom-up Gold Filling of High Aspect Ratio Features
Author:
Affiliation:
1. Materials Science and Engineering Division, National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, Maryland 20899, United States
Publisher
American Chemical Society (ACS)
Subject
General Medicine,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.accounts.2c00826
Reference48 articles.
1. Bottom-up Filling of Damascene Trenches with Gold in a Sulfite Electrolyte
2. Bottom-Up Gold Filling of High Aspect Ratio Trenches
3. Accelerated Bottom-Up Gold Filling of Metallized Trenches
4. Exploring the Limits of Bottom-Up Gold Filling to Fabricate Diffraction Gratings
5. Pushing the Limits of Bottom-Up Gold Filling for X-ray Grating Interferometry
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1. Molecular structure impacts of tetrazole derivatives on their diffusion and adsorption behaviors for microvia copper void-free filling;Surfaces and Interfaces;2024-01
2. Electrochemical Processes in Sulfite Gold Plating Solutions and Some Properties of Gold Coatings;Eurasian Journal of Chemistry;2023-12-30
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