Single-Step, Spin-on Process for High Fidelity and Selective Deposition
Author:
Affiliation:
1. Tokyo Electron U.S. Holdings, Inc., Austin, Texas 78741, United States
Funder
Semiconductor Research Corporation
Publisher
American Chemical Society (ACS)
Subject
Organic Chemistry,Polymers and Plastics,Process Chemistry and Technology
Link
http://pubs.acs.org/doi/pdf/10.1021/acsapm.9b00914
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