Spectroscopic and Modeling Investigations of the Gas-Phase Chemistry and Composition in Microwave Plasma Activated B2H6/Ar/H2 Mixtures
Author:
Affiliation:
1. School of Chemistry, University of Bristol, Bristol, United Kingdom, BS8 1TS and
2. Skobel’tsyn Institute of Nuclear Physics, Moscow State University, Leninskie Gory, Moscow, 119991 Russia
Publisher
American Chemical Society (ACS)
Subject
Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/jp9094694
Reference54 articles.
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5. Influence of diborane on the growth rate and phase stability of diamond films
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