Synthesis and Bidirectional Frequency Tuning of Cantilever-Shape Nano Resonators Using a Focused Ion Beam-Reference-Cited by-同舟云学术

Synthesis and Bidirectional Frequency Tuning of Cantilever-Shape Nano Resonators Using a Focused Ion Beam

Published:2013-09-25 Issue:19 Volume:5 Page:9684-9690
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Chang Jiyoung¹,Koh Kisik²,Min Byung-Kwon³,Lee Sang Jo³,Kim Jongbaeg³,Lin Liwei²

Affiliation:

1. Center of Integrated Nanomechanical Systems, University of California at Berkeley, Berkeley, California, 94720 United States

2. Berkeley Sensor and Actuator Center, Department of Mechanical Engineering, University of California at Berkeley, Berkeley, California, 94720 United States

3. School of Mechanical Engineering, Yonsei University, Seoul, 120-749 South Korea

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/am402738g

Reference25 articles.

1. Detecting and Evaluating the Signals of Wirelessly Interrogational Passive SAW Resonator Sensors

2. Adaptive tuning for vibrational gyroscopes

3. Low-loss and compact V-band MEMS-based analog tunable bandpass filters

4. A micromachined, single-crystal silicon, tunable resonator

5. Tunable resonators with electrostatic self test functionality for frequency selective vibration measurements

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