Electrical Double Layer Catalyzed Wet-Etching of Silicon Dioxide
Author:
Affiliation:
1. Department of Chemistry and the Columbia University Center for Electronics of Molecular Nanostructures, Columbia University, 3000 Broadway, New York, New York 10027
Publisher
American Chemical Society (ACS)
Subject
Colloid and Surface Chemistry,Biochemistry,General Chemistry,Catalysis
Link
https://pubs.acs.org/doi/pdf/10.1021/ja903333s
Reference14 articles.
1. International Technology Roadmap for Semiconductors, 2007 ed.http://www.itrs.net/Links/2007ITRS/Home2007.htm(accessed May 2009).
2. The Structure of the Electrical Double Layer at the Metal-Solution Interface
3. The electrical double layer: recent experimental and theoretical developments
4. Electrostatic Charging Due to Separation of Ions at Interfaces: Contact Electrification of Ionic Electrets
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