Electrical and Optical Properties of Radio-Frequency-Sputtered Thin Films of (ZnO)5In2O3
Author:
Affiliation:
1. Department of Applied Chemistry, Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm980173b
Reference31 articles.
1. Electrical and optical properties of vacuum-evaporated indium-tin oxide films with high electron mobility
2. Properties of tin doped indium oxide thin films prepared by magnetron sputtering
3. Properties of tin oxide films prepared by reactive electron beam evaporation
4. Highly Conductive and Transparent Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
5. Optical Properties of Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering
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