1. Department of Energy Materials & Chemical Engineering, Kyungpook National University (KNU), 2559 Gyeongsang-daero, Sangju-si, Gyeongsangbuk-do 37224, Republic of Korea
2. MEMS and Nanotechnology Laboratory, School of Mechanical Engineering, Chonnam National University (CNU), Gwangju 61186, Republic of Korea
3. Advanced Medical Device Research Center for Cardiovascular Disease, Chonnam National University (CNU), Gwangju 61186, Republic of Korea
4. Department of Energy Chemical Engineering, Kyungpook National University (KNU), 2559 Gyeongsang-daero, Sangju-si, Gyeongsangbuk-do 37224, Republic of Korea
5. Department of Advanced Science and Technology Convergence, Kyungpook National University (KNU), 2559 Gyeongsang-daero, Sangju-si, Gyeongsangbuk-do 37224, Republic of Korea
6. Department of Precision Mechanical Engineering, Kyungpook National University (KNU), 2559 Gyeongsang-daero, Sangju-si, Gyeongsangbuk-do 37224, Republic of Korea
7. Center for Next-Generation Sensor Research and Development, Chonnam National University (CNU), Gwangju 61186, Republic of Korea