1. School of Microelectronics, Fudan University, Shanghai 200433, China
2. Technology Innovation Institute, 9639, Masdar City, Abu Dhabi, United Arab Emirates
3. Jiashan Fudan Institute, Jiaxing 314110, China
4. Shanghai Integrated Circuit Manufacturing Innovation Center, Shanghai 201210, China
5. Hubei Yangtze Memory Laboratories, Wuhan 430205, China
6. Microelectronic Research Center, Department of Electrical and Computer Engineering, The University of Texas at Austin, Austin 78758, United States