Affiliation:
1. Harbin Institute of Technology, Harbin 150001, China
2. School of Microelectronics, Southern University of Science and Technology, Shenzhen 518055, China
3. Faculty of EEMCS, Delft University of Technology, 2628 CD Delft, The Netherlands
Funder
National Key Research and Development Program of China
Shenzhen Fundamental Research Program
Basic and Applied Basic Research Foundation of Guangdong Province
Science and Technology Planning Project of Shenzen Municipality
Joint Lab of Advanced Packaging and Testing Technology of Integrated Circuits
Joint Lab of Advanced Packaging Technology
Joint Lab of Advanced Situation Awareness
Publisher
American Chemical Society (ACS)