Intelligent MEMS Sensor Based on an Oxidized Medium-Entropy Alloy (FeCoNi) for H2 and CO Recognition

Author:

Yan Wenjun1ORCID,Liu Yun2,Bai Yan2,Chen Yulong3,Zhou Houpan1,Ahmad Waqar45

Affiliation:

1. School of Automation, Hangzhou Dianzi University, Hangzhou 310018, China

2. Faculty of Information, Liaoning University, Shenyang 110036, China

3. Industrialization Center of Micro & Nano ICs and Devices, Sino-German College of Intelligent Manufacturing, Shenzhen Technology University, Shenzhen 518118, China

4. Department of Chemical and Biological Engineering, Zhejiang University, Hangzhou 310027, China

5. Institute of Zhejiang University-Quzhou, 78 Jinhua Boulevard, Quzhou 324000, China

Funder

Natural Science Foundation of Liaoning Province

National Natural Science Foundation of China

Shenyang Municipal Bureau of Science and Technology

Zhejiang Provincial ?Jianbing? and ?Lingyan? R&D Programs

Publisher

American Chemical Society (ACS)

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