1. Shandong Laboratory of Advanced Materials and Green Manufacturing at Yantai, Yantai 264000, China
2. School of Instrument Science and Technology, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an 710049, China
3. State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi’an Jiaotong University (Yantai) Research Institute for Intelligent Sensing Technology and System, Xi’an Jiaotong University, Xi’an 710049, China
4. Northwest Institute of Nuclear Technology, Xi’an 710024, China
5. School of Electrical Engineering, Xi’an Jiaotong University, Xi’an, 710049, People’s Republic of China