1. State Key Laboratory of Advanced Materials for Smart Sensing, GRINM Group Co., Ltd., Beijing 100088, China
2. GRIMAT Engineering Institute Co., Ltd., Beijing 101407, China
3. General Research Institute for Nonferrous Metals, Beijing 100088, China
4. GRINM (Guangdong) Institute for Advanced Materials and Technology, Foshan 528000, China
5. Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China