1. Key Laboratory of Instrumentation Science and Dynamic Measurement Ministry of Education, North University of China, Taiyuan 030051, China
2. Pen-Tung Sah Institute of Micro-Nano Science and Technology, and Discipline of Intelligent Instrument and Equipment, Xiamen University, Xiamen 361102, China
3. Shenzhen Research institute of Xiamen University, Xiamen University, Shenzhen 518000, China