1. State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Changning Road 865, Shanghai 200050, China
2. Center of Materials Science and Optoelectronics Engineering, University of the Chinese Academy of Sciences, Yuquan Road 19, Beijing 100039, China
3. Heilongjiang Electric Power Research Institute, State Grid of China, Xiangjiang Road 7, Harbin 150030, China
4. State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 611731, China