1. Institute of Micro-Nano Science and Technology, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, P. R. China
2. State Key Laboratory of Pathogen and Biosecurity, Institute of Microbiology and Epidemiology, Academy of Military Medical Sciences, Beijing 100071, China
3. School of Environmental Science and Engineering, Shanghai Jiao Tong University, Shanghai 200240, P. R. China
4. International Training Institute for Material Science, Hanoi University of Science and Technology, Hanoi 112400, Vietnam
5. National Engineering Research Center for Nanotechnology, Shanghai 200241, P. R. China