Synchrotron Radiation Applied to Real-Time Studies of the Kinetics of Growth of Aluminum Nitride Thin Multilayers-Reference-Cited by-同舟云学术

Synchrotron Radiation Applied to Real-Time Studies of the Kinetics of Growth of Aluminum Nitride Thin Multilayers

Published:2019-01-31 Issue:7 Volume:123 Page:1679-1687
ISSN:1520-6106
Container-title:The Journal of Physical Chemistry B
language:en
Short-container-title:J. Phys. Chem. B

Author:

García Molleja J.¹²^ORCID,Bürgi J.¹,Kellermann G.³,Craievich A.⁴,Neuenschwander R.⁵,Jouan P.-Y.⁶,Djouadi M. A.⁶,Piccoli M.⁷,Bemporad E.⁷,De Felicis D.⁷,Feugeas J. N.¹

Affiliation:

1. Instituto de Física Rosario (Conicet-UNR), Bv. 27 de Febrero 210 bis, S2000EZP Rosario, Argentina

2. IMDEA Materials Institute, C/Eric Kandel 2, Parque Científico y Tecnológico de Tecnogetafe, 28906 Getafe, Spain

3. Departamento de Física, Universidade Federal do Paraná, Caixa Postal 19044, CEP81531-990 Curitiba, Brazil

4. Instituto de Física (Universidade de São Paulo), Rua do Matão Travessa R 187, CEP05508-090 São Paulo, Brazil

5. Laboratório Nacional de Luz Síncrotron (LNLS), Caixa Postal 6192, CEP13083-970 Campinas, Brazil

6. Institut des Matériaux Jean Rouxel (IMN-Université de Nantes, UMR CNRS 6502), 2 rue de la Houssinière, 44322 Nantes, France

7. Department of Engineering, University of Rome “Roma Tre”, Via della Vasca Navale 79, 00146 Rome, Italy

Funder

Universidad Nacional de Rosario

Ministerio de Ciencia, Tecnolog?a e Innovaci?n Productiva

Ministero degli Affari Esteri e della Cooperazione Internazionale

Fondo para la Investigaci?n Cient?fica y Tecnol?gica

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,Surfaces, Coatings and Films,Physical and Theoretical Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.jpcb.8b09496

Reference24 articles.

1. In situsynchrotron radiation diffraction study of low carbon steel during ion nitriding

2. Synchrotron Bragg diffraction imaging characterization of synthetic diamond crystals for optical and electronic power device applications

3. Recent applications of synchrotron radiation and neutrons in the study of soft matter

4. Influence of sputtering parameters and nitrogen on the microstructure of chromium nitride thin films deposited on steel substrate by direct-current reactive magnetron sputtering

5. The influence of deposition conditions on structure and morphology of aluminum nitride films deposited by radio frequency reactive sputtering