Affiliation:
1. Institute of Microelectronics Technology and High Purity Materials RAS, 142432Chernogolovka, Russia
Funder
Ministry of Education and Science of the Russian Federation
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Surfaces, Coatings and Films,Physical and Theoretical Chemistry
Cited by
3 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献