High-Speed, Sub-15 nm Feature Size Thermochemical Nanolithography-Reference-Cited by-同舟云学术

High-Speed, Sub-15 nm Feature Size Thermochemical Nanolithography

Published:2007-03-27 Issue:4 Volume:7 Page:1064-1069
ISSN:1530-6984
Container-title:Nano Letters
language:en
Short-container-title:Nano Lett.

Author:

Szoszkiewicz Robert¹,Okada Takashi¹,Jones Simon C.¹,Li Tai-De¹,King William P.¹,Marder Seth R.¹,Riedo Elisa¹

Affiliation:

1. School of Physics and Center for Organic Photonics and Electronics, Georgia Institute of Technology, Atlanta, Georgia 30332, School of Chemistry and Biochemistry and Center for Organic Photonics and Electronics, Georgia Institute of Technology, Atlanta, Georgia 30332, and Department of Mechanical Science and Engineering, University of Illinois Urbana-Champaign, Urbana, Illinois 61801

Publisher

American Chemical Society (ACS)

Subject

Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering

Link

https://pubs.acs.org/doi/pdf/10.1021/nl070300f

Reference44 articles.

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2. Technologies for nanofluidic systems: top-down vs. bottom-up—a review

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