Affiliation:
1. Department
of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, United States
2. Center
for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, United States
Funder
Brookhaven National Laboratory, Office of Science
NanoStructures Laboratory, Massachusetts Institute of Technology
Taiwan Semiconductor Manufacturing Company Ltd.
Tokyo Electron
Semiconductor Research Corporation
Center for Materials Science and Engineering, Massachusetts Institute of Technology
Division of Materials Research
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Inorganic Chemistry,Polymers and Plastics,Organic Chemistry
Cited by
49 articles.
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