Reactive Force Field Molecular Dynamics Study of the Effects of Gaseous Species on the Composition and Crystallinity of Silicon–Germanium Thin Films-Reference-Cited by-同舟云学术

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Reactive Force Field Molecular Dynamics Study of the Effects of Gaseous Species on the Composition and Crystallinity of Silicon–Germanium Thin Films

Published:2023-05-26 Issue:7 Volume:23 Page:4990-5000
ISSN:1528-7483
Container-title:Crystal Growth & Design
language:en
Short-container-title:Crystal Growth & Design

Author:

Uene Naoya¹²^ORCID,Mabuchi Takuya²³^ORCID,Zaitsu Masaru⁴,Yasuhara Shigeo⁴,Tokumasu Takashi²

Affiliation:

1. Graduate School of Engineering, Tohoku University, 2-1-1, Katahira, Aoba-ku, Sendai 980-8577, Japan

2. Institute of Fluid Science, Tohoku University, 2-1-1, Katahira, Aoba-ku, Sendai 980-8577, Japan

3. Frontier Research Institute of Interdisciplinary Sciences, Tohoku University, 2-1-1, Katahira, Aoba-ku, Sendai 980-8577, Japan

4. Japan Advanced Chemicals Ltd., 3007-4, Kamiechi, Atsugi, Kanazawa 243-0801, Japan

Funder

Japan Society for the Promotion of Science

Publisher

American Chemical Society (ACS)

Subject

Condensed Matter Physics,General Materials Science,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.cgd.3c00240

Reference69 articles.

1. Improved power conversion efficiency in radial junction thin film solar cells based on amorphous silicon germanium alloys

2. With PECVD Deposited Poly-SiGe and Poly-Ge Forming Contacts Between MEMS and Electronics

3. Biocompatibility and surface properties of hydrogenated amorphous silicon-germanium thin films prepared by LF-PECVD

4. Haddara, Y. M.; Ashburn, P.; Bagnall, D. M. Silicon-Germanium: Properties, Growth and Applications. In Springer Handbook of Electronic and Photonic Materials, 2017; pp 523–541.

5. New low-stress PECVD poly-SiGe layers for MEMS

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