Configurable Compliant Substrates for SiGe Nanomembrane Fabrication-Reference-Cited by-同舟云学术

Configurable Compliant Substrates for SiGe Nanomembrane Fabrication

Published:2015-06-10 Issue:7 Volume:15 Page:3399-3406
ISSN:1528-7483
Container-title:Crystal Growth & Design
language:en
Short-container-title:Crystal Growth & Design

Author:

Aqua Jean-Noël¹,Favre Luc²,Ronda Antoine²,Benkouider Abdelmalek²,Berbezier Isabelle²

Affiliation:

1. Institut des Nanosciences de Paris, Université Pierre et Marie Curie Paris 6, CNRS UMR 7588, 4 place Jussieu, 75252 Paris, France

2. Institut Matériaux Microélectronique Nanoscience de Provence, Aix-Marseille Université, UMR CNRS 6242, Avenue Escadrille Normandie Niemen - Case 142, 13997 Marseille, France

Publisher

American Chemical Society (ACS)

Subject

Condensed Matter Physics,General Materials Science,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.cgd.5b00485

Reference59 articles.

1. Nanomechanical Architecture of Strained Bilayer Thin Films: From Design Principles to Experimental Fabrication

2. Elastic strain relaxation in free-standing SiGe/Si structures

3. Elastically strain-sharing nanomembranes: flexible and transferable strained silicon and silicon–germanium alloys

4. Silicon nanomembranes for fingertip electronics

5. Stamp printing of silicon-nanomembrane-based photonic devices onto flexible substrates with a suspended configuration

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