Nb2O5 and Ta2O5 Thin Films from Polyoxometalate Precursors: A Single Proton Makes a Difference
Author:
Affiliation:
1. Center for Sustainable Materials Chemistry and Department of Chemistry, Oregon State University, Corvallis, Oregon 97331, United States
Funder
Division of Chemistry
Publisher
American Chemical Society (ACS)
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.cgd.5b00508
Reference31 articles.
1. Polyoxometalate Molecular Science
2. Oligomeric group 13 hydroxide compounds—a rare but varied class of molecules
3. Tantalum pentoxide (Ta2O5) thin films for advanced dielectric applications
4. Atomic layer deposition of tantalum oxide thin films for their use as diffusion barriers in microelectronic devices
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