1. Chair of MEMS Materials, Institute for Materials, Faculty of Mechanical Engineering, Ruhr-University Bochum, Universitaetsstrasse 150, D-44801 Bochum, Germany
2. Nano-Elecronics Materials Unit, International Center for Materials Nanoarchitectonics MANA, National Institute for Materials Science NIMS, 1-1 Namiki Tsukuba, Ibaraki 305-0044, Japan
3. Materials Analysis Station, National Institute for Materials Science NIMS, 1-2-1 Sengen, Tsukuba, Ibaraki 305-0047, Japan