1. Department of Semiconductor Materials Engineering, Wroclaw University of Science and Technology, Wybrzeze Wyspianskiego 27, 50-370 Wrocław, Poland
2. Saule Research Institute, Dunska 11, 54-427 Wrocław, Poland
3. Łukasiewicz Research Network─PORT Polish Center for Technology Development, Stabłowicka 147, 54-066 Wrocław, Poland