Vapor Sensors Based on Optical Interferometry from Oxidized Microporous Silicon Films
Author:
Affiliation:
1. Department of Chemistry and Biochemistry, University of California, San Diego, La Jolla, California 92093-0358
Publisher
American Chemical Society (ACS)
Subject
Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/la015568f
Reference57 articles.
1. Porous silicon as a material in microsensor technology
2. Gas Identification by a Single Gas Sensor using Porous Silicon as the Sensitive Material
3. Identification of Water Molecules in Low Humidity and Possibility of Quantitative Gas Analysis using Porous Silicon Gas Sensor
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