Transfer of Pre-Assembled Block Copolymer Thin Film to Nanopattern Unconventional Substrates
Author:
Affiliation:
1. Department of Materials Science and Engineering, University of Wisconsin-Madison, Wisconsin 53706, United States
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/am501816n
Reference53 articles.
1. Block Copolymer Lithography: Periodic Arrays of ~10 11 Holes in 1 Square Centimeter
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4. Graphoepitaxy of cylinder-forming block copolymers for use as templates to pattern magnetic metal dot arrays
5. Polymer self assembly in semiconductor microelectronics
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