In-Line Catalytic Purification of Carbon Dioxide Used in Precision Cleaning Applications-Reference-Cited by-同舟云学术

In-Line Catalytic Purification of Carbon Dioxide Used in Precision Cleaning Applications

Published:2012-01-31 Issue:7 Volume:51 Page:2882-2887
ISSN:0888-5885
Container-title:Industrial & Engineering Chemistry Research
language:en
Short-container-title:Ind. Eng. Chem. Res.

Author:

Zorn Michael E.¹²,Tompkins Dean T.²,Zeltner Walter A.²,Anderson Marc A.²³,Etter John T.²

Affiliation:

1. Department of Natural and Applied Sciences (Chemistry), University of Wisconsin—Green Bay, 2420 Nicolet Drive, Green Bay, Wisconsin 54311, United States

2. Microporous Oxides Science and Technology, LLC, 393 Lake Kegonsa Road, Oregon, Wisconsin 53575, United States

3. Environmental Chemistry and Technology Program, University of Wisconsin—Madison, 660 North Park Street, Madison, Wisconsin 53706, United States

Publisher

American Chemical Society (ACS)

Subject

Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/ie202402w

Reference27 articles.

1. Surface cleaning with the carbon dioxide snow jet

2. Utilization of critical fluids in processing semiconductors and their related materials

3. Carbon Dioxide Snow Cleaning

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