Roles of Hydrogen and Oxygen in the Direct Nitridation of Silicon-Reference-Cited by-同舟云学术

Roles of Hydrogen and Oxygen in the Direct Nitridation of Silicon

Published:2002-12-13 Issue:12 Volume:42 Page:2434-2440
ISSN:0888-5885
Container-title:Industrial & Engineering Chemistry Research
language:en
Short-container-title:Ind. Eng. Chem. Res.

Author:

Pavarajarn Varong¹,Kimura Shoichi¹

Affiliation:

1. Department of Chemical Engineering, Oregon State University, Corvallis, Oregon 97331-2702

Publisher

American Chemical Society (ACS)

Subject

Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/ie020547h

Reference31 articles.

1. Pavarajarn, V. Effects of Gas and Solid Components in the Direct Nitridation of Silicon. Ph.D. Dissertation, Oregon State University, Corvallis, OR, 2002.

2. Reaction-bonded silicon nitride: its formation and properties

3. Catalytic Effects of Metals on Direct Nitridation of Silicon

4. Silicon Nitride and Related Materials

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