Spectroscopic Characterization of the Atomic Hydrogen Energies and Densities and Carbon Species during Helium−Hydrogen−Methane Plasma CVD Synthesis of Diamond Films-Reference-Cited by-同舟云学术

Spectroscopic Characterization of the Atomic Hydrogen Energies and Densities and Carbon Species during Helium−Hydrogen−Methane Plasma CVD Synthesis of Diamond Films

Published:2003-02-20 Issue:6 Volume:15 Page:1313-1321
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Mills Randell¹,Sankar Jayasree¹,Ray Paresh¹,Dhandapani Bala¹,He Jiliang¹

Affiliation:

1. BlackLight Power, Inc., 493 Old Trenton Road, Cranbury, New Jersey 08512

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cm020817m

Reference30 articles.

1. Diamond thin films: a 21st-century material

2. Diamond nanocrystals formed by direct implantation of fused silica with carbon

3. Optical emission spectroscopic studies of microwave enhanced diamond CVD using CH 4 /CO 2 plasmas

4. Low temperature diamond growth using CO2/CH4 plasmas: Molecular beam mass spectrometry and computer simulation investigations

5. Molecular beam mass spectrometry investigations of low temperature diamond growth using CO2/CH4 plasmas

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