Realizing the Potential of RF-Sputtered Hydrogenated Fluorine-Doped Indium Oxide as an Electrode Material for Ultrathin SiOx/Poly-Si Passivating Contacts

Author:

Han Can12ORCID,Yang Guangtao1,Montes Ana13,Procel Paul1,Mazzarella Luana1,Zhao Yifeng1,Eijt Stephan4,Schut Henk4,Zhang Xiaodan5ORCID,Zeman Miro1,Isabella Olindo1

Affiliation:

1. Photovoltaic Materials and Devices group, Delft University of Technology, Delft 2628 CD, The Netherlands

2. Shenzhen Institute of Wide-bandgap Semiconductors, Shenzhen 518055, China

3. Faculty of Sciences of University of Lisbon, Lisbon 1749-06, Portugal

4. Department of Radiation Science and Technology, Faculty of Applied Sciences, Delft University of Technology, Delft 2629 JB, The Netherlands

5. Institute of Photoelectronic Thin Film Devices and Technology of Nankai University, Tianjin 300350, China

Funder

Guangdong Province

Publisher

American Chemical Society (ACS)

Subject

Electrical and Electronic Engineering,Materials Chemistry,Electrochemistry,Energy Engineering and Power Technology,Chemical Engineering (miscellaneous)

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