Observing the Nucleation Phase of Atomic Layer Deposition In Situ
Author:
Affiliation:
1. Honda Research Institute USA, Mountain View, California 94043, United States
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm302398v
Reference26 articles.
1. Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process
2. Atomic Layer Deposition of Hafnium and Zirconium Oxides Using Metal Amide Precursors
3. Supported Ru−Pt Bimetallic Nanoparticle Catalysts Prepared by Atomic Layer Deposition
4. Ultralow Loading Pt Nanocatalysts Prepared by Atomic Layer Deposition on Carbon Aerogels
5. Atomic Layer Deposition (ALD) Co-Deposited Pt−Ru Binary and Pt Skin Catalysts for Concentrated Methanol Oxidation
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