Proximity Injection of Plasticizing Molecules to Self-Assembling Polymers for Large-Area, Ultrafast Nanopatterning in the Sub-10-nm Regime-Reference-Cited by-同舟云学术

Proximity Injection of Plasticizing Molecules to Self-Assembling Polymers for Large-Area, Ultrafast Nanopatterning in the Sub-10-nm Regime

Published:2013-07-09 Issue:8 Volume:7 Page:6747-6757
ISSN:1936-0851
Container-title:ACS Nano
language:en
Short-container-title:ACS Nano

Author:

Jeong Jae Won¹,Hur Yoon Hyung¹,Kim Hyeong-jun²,Kim Jong Min¹,Park Woon Ik¹,Kim Mi Jeong³,Kim Bumjoon J.²,Jung Yeon Sik¹

Affiliation:

1. Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 302-701, Republic of Korea

2. Department of Chemical & Biomolecular Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 302-701, Republic of Korea

3. Samsung Advanced Institute of Technology (SAIT), Mt. 14-1, Nongseo-dong, Giheung-gu, Yongin-si, Gyeonggi-do, 446-712, Republic of Korea

Publisher

American Chemical Society (ACS)

Subject

General Physics and Astronomy,General Engineering,General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/nn401611z

Reference59 articles.

1. Block Copolymer Lithography: Periodic Arrays of ~10 11 Holes in 1 Square Centimeter

2. Polymers on Nanoperiodic, Heterogeneous Surfaces

3. Graphoepitaxy of Spherical Domain Block Copolymer Films

4. Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates

5. Nanostructure engineering by templated self-assembly of block copolymers

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